Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization

Title: Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization
Creator: Omidbeike, Meysam; Moore, Steven I.; Yong, Yuen K.; Fleming, Andrew J.
Relation: Sensors and Actuators A: Physical Vol. 332, Issue 1 December 2021, no. 113125
Publisher Link: http://dx.doi.org/10.1016/j.sna.2021.113125
Publisher: Elsevier
Resource Type: journal article
Date: 2021
Description: The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.
Subject: nanopositioning; atomic force microscopy; Piezoelectric actuators; axis
Identifier: http://hdl.handle.net/1959.13/1435388
Identifier: uon:39703
Identifier: ISSN:0924-4247
Language: eng
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